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An electrostatic chuck (ESC) is a device that generates an attractive force between an electrode and an object when voltage is applied to the electrode. It is widely used in semiconductor and display manufacturing processes to securely hold wafers or panels during processing.

• Capable of adsorbing a wide range of objects, including metal conductors, semiconductors, displays, insulators (glass), and porous materials.
  
  

• Performs reliably in vacuum environments.
  
  

• No electrostatic side effects: The electric field does not affect the backside of objects such as TFT circuits.
  
  

• No mechanical impact on the object: Uniform adsorption force is applied across the surface, preventing indentation, scratches, or other damage.